Plasma Etch BT-1/C Plasma Etcher / Plasma Cleaner
Includes vacuum pump
The BT-1 is a complete industrial grade plasma treatment solution capable of plasma cleaning, plasma etching, reactive ion etching (RIE), and more. Its large processing shelves and spacious chamber make this model perfect for the semiconductor, electronics, solar, PCB (printed circuit board), and industrial manufacturing markets as well as any other company in need of a cost-effective, high yield plasma processing solution.
Five Stacked Horizontal (20"Wx21"D + 3" Clearance) with Several Optional Configurations AvailableGenerator
600W 13.56MHz Continuously Variable Power Supply with Automatic Matching NetworkGas Control
One 0-200cc Mass Flow ControllerControl System
Color PLC-Based Touch Screen Control Interface; Stores up to 20 Two-Step RecipesVacuum Gauge
1-2000 mTVacuum Pump
29CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)
3 Micron Oil Filtration SystemChamber Material
6061-T6 AluminumChamber Dimensions
Approx. 1200lbsVacuum Pump Weight
150lbsMade in the U.S.A.