Plasma Etch BT-1/C Plasma Etcher / Cleaner inc Drypump Vacuum

Plasma Etch BT-1/C Plasma Etcher / Plasma Cleaner 

Includes vacuum pump

The BT-1 is a complete industrial grade plasma treatment solution capable of plasma cleaning, plasma etching, reactive ion etching (RIE), and more. Its large processing shelves and spacious chamber make this model perfect for the semiconductor, electronics, solar, PCB (printed circuit board), and industrial manufacturing markets as well as any other company in need of a cost-effective, high yield plasma processing solution.

Electrode Configuration

Five Stacked Horizontal (20"Wx21"D + 3" Clearance) with Several Optional Configurations Available

600W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network

One 0-200cc Mass Flow Controller

Color PLC-Based Touch Screen Control Interface; Stores up to 20 Two-Step Recipes

1-2000 mT

29CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

3 Micron Oil Filtration System

6061-T6 Aluminum

25”x25”x22”

70"x36”x32”

Approx. 1200lbs

150lbs